General Co-Chairs

Helmut Seidel, Saarland University, Germany
Ulrich Schmid, Saarland University, Germany

Local Organizing Committee

Ute Flieger, Saarland University, Germany
Uta Merkle, KWT, Saarland University, Germany

Programme Committee

Dongil Cho, Seoul National University, Korea
Miko Elwenspoek, Twente University, The Netherlands
Qing-An Huang, Southeast University, China
John J. Kelly, University of Utrecht, The Netherlands
Les M. Landsberger, Concordia University, Canada
A. Jasper Nijdam, The Ohio State University, United States
Michael L. Reed, University of Virginia, United States
Kazuo Sato, Nagoya University, Japan
Helmut Seidel, Saarland University, Germany, (Chairman)

Steering Committee

P. Allongue, PLE/CNRS, France
H. Camon, LAAS/CNRS, France
M. Elwenspoek, Twente University, The Netherlands
M. Esashi, Tohoku University, Japan
M. Kahrizi, Concordia University, Canada
J. J. Kelly, University of Utrecht, The Netherlands
L. M. Landsberger, Concordia University, Canada
A. J. Nijdam, The Ohio State University, United States
M. L. Reed, University of Virginia, United States
K. Sato, Nagoya University, Japan
J. Schiffrin, Liverpool University, United-Kingdom
H. Seidel, Saarland University, Germany
O. Tabata, Kyoto University, Japan

Wet chemical etching of semiconductors has found a wide range of applications in microsystems technology (MST), i.e. in the fabrication of micro electro mechanical systems (MEMS). Most prominently, the anisotropic etching of silicon in alkaline solutions provides the technological basis for bulk micromachining. In addition to crystallographic anisotropy, aspects of etch stop phenomena, the electrochemical behaviour and the influence of light are further important properties. Besides silicon, other semiconductors like GaAs or germanium and also quartz as a piezoelectric dielectric are known to exhibit anisotropic etching behaviour for quite some time, already. More recently, an increased interest in the etching of wide bandgap semiconductors, such as SiC, GaN and other new materials is arising. Another important topic is the porousification of materials, best known in the case of silicon. By the formation of nano- to micro-sized pores, the surface area can be enlarged substantially. A number of exciting new applications in device fabrication has appeared recently.

The etching and porousification of crystalline semiconductor materials turn out to be very complex phenomena. Their clarification requires knowledge in the chemistry of the involved materials, in the physical and crystallographic properties of the solid and in the electrochemical interaction between solid and liquid through the exchange of charge carriers or by the influence of light. Thus, a multi disciplinary approach combining different scientific studies in (electro) chemistry, crystallography and crystal growth, micro-machining, as well as modelling at macroscopic or microscopic level is required to enhance the understanding of all observed phenomena. The semiconductor wet-etch community has generally recognized the necessity of discussion among interested scientists from all these different backgrounds; e.g. electro-chemistry, physics, crystallography, micromachining, and applications.

This fifth bi-annual workshop on the physical chemistry of wet etching of semiconductors will be held in Saarbrücken, Germany, aiming to deepen the understanding of the subject and to illuminate new applications. It is a unique opportunity to meet specialists of different fields from academia or from industry. Your research efforts (academic and industrial) related to the topics listed below are kindly invited to be submitted. There will be oral presentations and a poster session. Sufficient time for discussions and for informal meetings will be given.

Topics

Any topics related to the physical chemistry of wet etching of semiconductors, including new applications, are welcome; in particular:

• Process technologies
• In-situ observation of etching
• Characterization of etch anisotropy
• Surface morphology
• Etch stop phenomena
• Porousification
• Influence of light
• Electro-chemistry
• Modelling
• Simulation and CAD
• Crystal growth as a reverse process
• Innovative applications in micromachining
• Materials: Si, Ge, GaAs, SiC, GaN, Quartz, etc.

	Before May 8	After May 8
Regular participant	300 €	350 €
Student participant	150 €	200 €

Included in this fee are coffee breaks, light lunches, one conference dinner on Tuesday evening and Proceedings in printed and electronic form. Additional tickets for the dinner are available on site for 50,00 €.

Registration form

The programme will include two invited presentations, two days of oral presentations and one poster session. A detailed programme is available here.

Submission of a two-page abstract is due on April 10, 2006.
Notification of acceptance on April 27, 2006.

The submission of abstracts is requested in electronic form by e-mail. The preferred format is PDF (Acrobat). MS Word files will also be accepted. Please prepare a two-page abstract. The first page should include title, authors, short affiliations, contact information of submitting author and the technical description. The second page should include figures and photographs. References can be on either page.

A sample abstract is available for download.

Send your abstract by e-mail to the following address: u.flieger@lmm.uni-saarland.de by no later than April 10, 2006.
This abstract will be included in the proceedings. Authors will be given the opportunity to submit a full length paper to a special issue of the Journal of Micromechanics and Microengineering (JMM).

Situated in the southwest of Germany close to Luxembourg and the neighbouring French region of Lorraine, Saarland´s capital town of Saarbrücken offers something for everyone. Come and experience art, culture and nature in the town at the river. Enjoy sunny days at the quarter “St. Johanner Markt” with a glass of wine or a good meal. Even if your visit to Saarbrücken is limited to just a few days, you will not be bored because of the Saarländer´s French art of living.

Places of interest (sightseeing)

Meeting place

Saarland University Science Park 2
Saarland University

The main campus of Saarland University is situated in one of the many wooded areas surrounding Saarbrücken.

How to reach Saarbrücken and the University Campus

• by car
  • via the A1 motorway from the north (Trier)
  • via the A620 from Luxembourg and
  • via the A4/E50 when approaching from either Metz/Paris or Straßbourg
  • via the A63 and A6 when approaching from Frankfurt/Main
• by train (Intercity - Saarbrücken Central Station) and
• by plane (Airport Saarbrücken - Ensheim)
• by plane (Airport Frankfurt/Main)
  Frankfurt Airport is 200 km from Saarbrücken. As an International Hub Airport Frankfurt Airport connects to all European and international airports. Furthermore the airport provides connections to the regional and the long-distance train stations. For further information as well as arrival and departure timetables please contact Flughafen Frankfurt/Main AG.
  
  
• by plane (Airport Frankfurt/Hahn)
  The Frankfurt-Hahn airport is aproximately 125 km from Saarbrücken. There are shuttle buses to and from the Saarbrücken main train station (Hauptbahnhof), which run on a daily basis. The single fare costs Euro 13,-. The transfer takes about 2 hours. For further information as well as arrival and departure timetables please contact Flughafen Frankfurt-Hahn.
  
  

Map of the region

( Map of the region, courtesy of Saarland-Touristik - Landesfremdenverkehrsverband Saarland e.V. - Saarbrücken )

Travelling to the University by car

GPS-Coordinates:
N 49° 15' 32,0"
E 07° 02' 25,4"

Approaching from the east (Mannheim/Karlsruhe): A6 Mannheim-Paris motorway as far as the exit "Ausfahrt St. Ingbert West". Follow road signs to the main entrance of the University ("Universität").

Approaching from the north (Koblenz/Trier): Follow the A1 as far as the junction "Autobahnkreuz Saarbrücken", then take the A8 as far as the junction "Autobahnkreuz Neunkirchen". From there proceed towards Saarbrücken (see: "Approaching from the east"). This is a detour, but it will save you a lot of searching and slow-moving traffic in the centre of Saarbrücken.

Approaching from France: Take the Paris - Mannheim motorway as far as the exit "Ausfahrt St. Ingbert West". Follow road signs to the main entrance of the University ("Universität").

Approaching from Luxembourg: Follow the A620 towards Saarbrücken, as far as the exit "Ausfahrt Bismarckbrücke". Follow road signs to the main entrance of the University ("Universität").





Interactive map of Saarbrücken

Travelling to the University by train

From the north via Koblenz/Trier (hourly service: Regionalexpress or Inter-Regio, IR). From the east via Mannheim (hourly service: IR or Inter-City, IC) or via Karlsruhe. From the west via Metz and from the south via Straßbourg.

For more information, contact Deutsche Bahn AG (German Railways).

The bus routes 49, 61 or 69 run by the Saartal Bus Company (to "Dudweiler-Dudoplatz" or "Uni-Campus") will take you from Saarbrücken Central Station to the University, as will a number of other bus services run by companies within the Saarland Public Transport Association (VGS).

For more detailed information, please refer to either the Saarbrücken Bus Timetables, which provides travel information on the Saarbahn (the Saarbrücken urban railway) and the bus services run by the Saartal Bus Company, or to the VGS Online Travel Information System, which supplies information on bus rail services run by companies within the Saarland Public Transport Association (VGS).

There are two bus stops "Uni-Campus" and "Uni-Mensa" within the University campus .

Travelling to the University by plane

Saarbrücken Airport has direct connections with the following cities:
Düsseldorf, Hamburg, Berlin THF, Leipzig and Dresden, München and Luxemburg.

Distances

Köln - Saarbrücken	280 km
Frankfurt - Saarbrücken	200 km
Straßbourg - Saarbrücken	110 km
Paris - Saarbrücken	390 km
Luxembourg - Saarbrücken	90 km
Brussels - Saarbrücken	320 km
Ensheim - Saarbrücken	13 km

Conference Hotels

Domaine Hotel Leidinger
City Hotel Saarbrücken

Rooms will be reserved under the keyword 'PCWES' up to April 27, 2006.

Saarbrücken Hotels

http://www.greekfiles.com/germany_hotels.php?hs_city=saarbruecken